The PolyNano project carries out specific and coordinated activities to generate the masters needed to shape polymers at micro/nano scale for PolyNano’s applications, to develop and optimize the polymer replication processes, and to apply high accuracy quality control techniques with micro/nano metrology tools.

Stampers for µIM and NIL are fabricated using micro/nano lithography (UV, e-beam, see Figure 1A) and nickel electroplating (see Figure 1B).  Design rules and materials will be evaluated in order to ensure the manufacturing of stamps and shims with long life time, high accuracy and short production time.

Polymer replication is deeply investigated to develop and validated processes based on µIM (see Figure 1C), NIL, and the combination of the two. A specific success criterion for the processes will be to achieve reproducible replication of sub-100 nm features and sub-μm overlay registration for both individual and combined processes.

PolyNano validates the overall process chains for mass production of polymer-based LoC applying traceable geometrical metrology methods and measuring instruments with nanometre accuracy (see Figure 1A, 1B, 1C). The aim is to ensure manufacturing reproducibility and process chain calibration from the origination masters to the replicated polymer parts.

PolyNano integrates the developed production technology know-how in a process library where process parameters, critical dimensions and design rules are specified for use in the PolyNano OEM service.

Production technologies team
Theodor Nielsen, CEO, NIL Technology, PolyNano Leader “Masters and Shims”
Rafael Taboryski, Associate professor, DTU Nanotech, PolyNano Leader “Polymer Replication”
Hans N. Hansen, Professor, DTU Mechanical Engineering, PolyNano Leader “Process Chain Validation”

Figure 1 Process chain for sub-micro channels (width = 500 nm, depth = 60 nm) manufacture: (A) e-beam lithography on silicon, (B) nickel electroplating, (C) replication by micro injection moulding (material: Cyclic Olefin Copolymer, COC TOPAS 6015).
The process chain validation is performed by calibrated atomic force microscope measurements with uncertainty and relocation accuracy at nanometre level (magnification: X 1x, Y 1x, Z 5x).
17 FEBRUARY 2019